- San Jose, California, United States
- US $9,500.00
- Jan 30th
ATV Technologies PEO-601 fast ramping bench top vacuum process furnace, quartz glass process tube holds up to 40 100mm wafers, maximum temp 1150C, fast ramping up to 100C/min, fast cool down, vacuum to 5x10E-6mbar, less then 1ppm oxygen, 100 step process controller, applications include wafer bump reflow, polyimide cure, SiAu, SiAL, SiMo alloying, post implant diffusion, LPCVD, wet/dry thermal oxidation, thick film paste firing, Si epitaxy, 220v/3ph.