Akrion Systems Gama 200mm Quartz Qdr Tank

US $2,975.00

  • Albany, Oregon, United States
  • Jan 30th
This item is a Quartz QDR rinse tank used by Akrion for their Gama wet stations. The tank is sized for dual 200mm teflon wafer cassettes. The tank is in excellent condition and includes built in flow bars for incoming DI water flow. The tank has dual 3/4 inch flare fitting input connections on the front end of the tank and is shipped with the correct fittings required. This tank will be hard cleaned to remove organics, particulates and metallic/ionic contamination. The tank will be packaged for shipment in a cleanroom and ready for installation. This tank is compatible with Akrion wet stations using active grippers often built for Sumitomo down flow spin dryers. The tank pistons are on the bottom. This tank was removed from Submicron Systems/Akrion Project Number 325-04.    
Condition:
Seller refurbished: An item that has been restored to working order by the eBay seller or a third party not approved by the manufacturer. This means the item has been inspected, cleaned, and repaired to full working order and is in excellent condition. This item may or may not be in original packaging. See the seller’s listing for full details. ...
Brand Akrion Systems
MPN 200mm Dual Cassette
Model Gama Wet Station

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